Precision Components for Semiconductor Manufacturing Equipment
Precision machined components for semiconductor equipment: vacuum-compatible, optical-mount and structural parts with FAI and material traceability.
Semiconductor equipment components are the structural, vacuum and optical-mounting parts inside wafer-handling, inspection and process tools. Xinyuanmu Precision machines these parts from aluminium, stainless and specialty alloys to tight tolerances, with first-article inspection, material traceability and clean handling appropriate to the tool environment.
Scope: what this product page covers
This page covers non-customer-specific structural and mounting hardware for semiconductor tools: base plates, brackets, enclosures, vacuum-chamber support parts, optical mounts and manifolds. It does not cover any customer drawing, part number or specification — those are handled under NDA through the compliance gate.
Specifications
| Typical materials | Aluminium 6061/7075, 304/316L, 17-4PH, SUS440C |
|---|---|
| Tolerance (general) | ±0.05 mm typical |
| Critical features | Tighter bands confirmed by FAI |
| Surface finish | Ra 0.4 µm achievable |
| Documentation | FAI, material cert, dimensional report |
| Handling | Clean packaging; vacuum-compatible options on request |
| Order quantity | Prototype through small/mid batch |
Materials
- Aluminium 6061-T6, 7075-T6
- Stainless 304, 316L
- 17-4PH and SUS440C for hardened parts
- Titanium Grade 5
- Engineering plastics for non-load features
Manufacturing process
- Requirement and compliance check Any controlled or customer-specific semiconductor project is reviewed through our compliance gate before drawings are exchanged. General equipment hardware can proceed through the standard DFM flow.
- Material and clean handling plan Grade is selected for the tool environment, with mill certificates and optional heat-number traceability. Packaging is chosen to avoid contamination of machined surfaces.
- Machining and tolerance control Critical features are finished in minimal setups to control stack-up. Surface finish is controlled where it affects sealing or optical mounting.
- Inspection and documentation First-article inspection, dimensional report and material certificate accompany the parts. Traceability records are available on request.
Semiconductor Equipment Components in production
Typical applications
- Wafer-handling and inspection tool structures
- Optical-mount and alignment hardware
- Vacuum-chamber support and bracket parts
- Process-tool manifolds and enclosures
- Metrology and fixturing components
- R&D and NPI prototype hardware
Quality and documentation
- First-article inspection on new part numbers
- Material certificates and heat-number traceability on request
- Dimensional inspection reports per lot
- Clean packaging to reduce contamination risk
- NDA and compliance gate before controlled data is exchanged
What we do not do
We manufacture the mechanical components, not the electronic, optical or process modules of semiconductor tools. Customer-specific drawings, part numbers and specifications are treated as confidential and handled only under NDA through the compliance gate. We do not claim certifications not yet formally held, and we do not auto-quote controlled or sanctioned-entity work.
Technical questions
Can you machine vacuum-compatible components?
Yes, for the mechanical hardware. Material grade and surface condition are selected for the vacuum environment, and we work to the cleanliness and packaging requirements you specify. Process-gas or ultra-high-vacuum validation remains your verification step.
Do you handle customer-specific semiconductor drawings?
Only under NDA through our compliance gate. We do not publish any customer part number, drawing or specification, and confidential data is never used for marketing or shared with third parties.
What traceability do you provide?
Material certificates are available with shipments, and heat-number traceability can be provided on request. First-article inspection reports accompany new part numbers.
Adjacent products and capabilities
CNC Machined Precision Parts
CNC machined parts are metal or plastic components produced by subtractive cutting on computer-controlled milling and turning centres. Xinyuanmu Precision machines custom parts from customer drawings across aluminium, stainless steel, titanium and engineering plastics, targeting ±0.05 mm on general dimensions and tighter bands on critical features, with a written DFM review before every quote and first-article inspection on new part numbers..
View productCNC Turned Components
CNC turned components are rotationally symmetric parts produced on lathes where the workpiece spins and a stationary or driven tool removes material. Xinyuanmu Precision turns shafts, pins, bushings, fittings and threaded parts with live tooling for cross-drilling and milling in the same setup, targeting ±0.05 mm on diameters with tighter bands confirmed by inspection, from a single prototype to small-batch production..
View productPhotonics & Optical Components
Photonics and optical components are the mounts, housings and structural parts that hold lenses, fibres and optical sub-assemblies in alignment. Xinyuanmu Precision machines these parts from dimensionally stable materials to tight tolerances, with surface finish and clean handling controlled so that alignment and stray-light performance are preserved..
View productInspection & Documentation
First-article inspection, material certificates and dimensional reports for new part numbers.
Inspection capabilitySend drawings, get a review and a quote
Send a STEP file and a 2D drawing. You get a fixed-price quotation with lead time and a written DFM note — no obligation, and no sales call unless you ask for one.